The 62nd JSAP Spring Meeting, 2015

Presentation information

Print

Symposium

Symposium » Advanced CMOS Technology and Its Future Scope

[11p-B5-1~9] Advanced CMOS Technology and Its Future Scope

Wed. Mar 11, 2015 1:15 PM - 5:30 PM B5 (6B-105)

2:00 PM - 2:30 PM

[11p-B5-3] Prediction and Control Technology for Etching Damage on Advanced CMOS

〇Nobuyuki Kuboi1, Masanaga Fukasawa1, Tetsuya Tatsumi1 (1.Sony)

Keywords:semiconductor,etching,damage