[11p-B5-1~9] 最先端CMOS技術とその将来展望

[11p-B5-6] AC performance improvement by RMG module for 14nm FinFETs and beyond

〇Mitsuhiro Togo¹、M. Joshi¹、H. V. Meer¹、C. Yong¹、B. Liu¹、X. He¹、X. Wu¹、S. Y. Mun¹、X. Zhang¹、D. Konduparthi¹、J. Lian¹、G. Bohra¹、W. H. Tong¹、C. Y. Xiao¹、D. Triyoso¹、E. Banghart¹、S. M. Pandey¹、A. Wei¹、R. Pal¹、R. Carter¹、M. H. Nam¹、M. Eller¹、S. Samavedam¹ (1.GLOBALFOUNDRIES)

キーワード：FinFET、Replacement Metal Gate、AC performance