The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[11p-C1-1~17] 6.2 Carbon-based thin films

Wed. Mar 11, 2015 1:15 PM - 6:00 PM C1 (6C-104)

1:30 PM - 1:45 PM

[11p-C1-2] Misorientation angle dependence of homoepitaxial growth on (001) heavily boron-doped diamond

〇(DC)Hiroyuki Kawashima1, 2, 3, Hiromitsu Kato2, 3, Masahiko Ogura2, 3, Toshiharu Makino2, 3, Daisuke Takeuchi2, 3, Satoshi Yamasaki1, 2, 3 (1.Univ. of Tsukuba, 2.AIST, 3.JST/CREST)

Keywords:boron-doped diamond,CVD,misorientation angle dependence