The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[11p-C1-1~17] 6.2 Carbon-based thin films

Wed. Mar 11, 2015 1:15 PM - 6:00 PM C1 (6C-104)

2:00 PM - 2:15 PM

[11p-C1-4] Characterization of heavily phosphorus doped n-type diamond thin films

〇(PC)Ryota Ohtani1, Takashi Yamamoto1, Satoshi Koizumi1 (1.NIMS)

Keywords:CVD,diamond,doping