Improvement of uniformity of IGZO film for large sputtering cathode

Presentation information

Oral presentation

Joint Session K » Joint Session K

Wed. Mar 11, 2015 1:15 PM - 5:45 PM D1 (16-101)

4:45 PM - 5:00 PM

〇Yasuo Okubo¹, Tatsunori Isobe¹, Makoto Arai¹, Junya Kiyota¹, Kazuya Saito¹ (1.ULVAC)

Keywords:IGZO,sputter