[11p-D1-1~17] Joint Session K

[11p-D1-2] Impact of Phonon Scattering due to Miniaturization of C-Axis-Aligned Crystalline IGZO FETs

〇Shinpei Matsuda¹, Erumu Kikuchi¹, Yasumasa Yamane¹, Yutaka Okazaki¹, Shunpei Yamazaki¹ (1.SEL)

Keywords:IGZO,field-effect mobilty,miniaturization