Investigation of irradiation effect of microwave and VUV light on oxide semiconductor film prepared by solution process at low temperature

Presentation information

Oral presentation

Joint Session K » Joint Session K

Wed. Mar 11, 2015 1:15 PM - 5:45 PM D1 (16-101)

2:15 PM - 2:30 PM

〇(PC)Heajeong Cheong¹, Shintaro Ogura¹, Manabu Yoshida¹, Hirobumi Ushijima¹, Nobuko Fukuda¹, Sei Uemura¹ (1.AIST)

Keywords:Oxide semiconductor (IGZO),TFT,Microwave,Photo irradiation