The 62nd JSAP Spring Meeting, 2015

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Joint Session K » Joint Session K

[11p-D1-1~17] Joint Session K

Wed. Mar 11, 2015 1:15 PM - 5:45 PM D1 (16-101)

2:15 PM - 2:30 PM

[11p-D1-5] Investigation of irradiation effect of microwave and VUV light on oxide semiconductor film prepared by solution process at low temperature

〇(PC)Heajeong Cheong1, Shintaro Ogura1, Manabu Yoshida1, Hirobumi Ushijima1, Nobuko Fukuda1, Sei Uemura1 (1.AIST)

Keywords:Oxide semiconductor (IGZO),TFT,Microwave,Photo irradiation