The 62nd JSAP Spring Meeting, 2015

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Joint Session K » Joint Session K

[11p-D1-1~17] Joint Session K

Wed. Mar 11, 2015 1:15 PM - 5:45 PM D1 (16-101)

2:30 PM - 2:45 PM

[11p-D1-6] TFT performance of IZO Semiconductor Thin Films Prepared by Photo-Assisted Sol-Gel Processing

〇Takehito Kodzasa1, Hea-Jeong Cheong1, Sei Uemura1, Manabu Yoshida1, Satoshi Hoshino1 (1.AIST-FLEC)

Keywords:amorphous oxide semiconductor,photo assisted sol-gel