The 62nd JSAP Spring Meeting, 2015

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15 Crystal Engineering » 15.5 Group IV crystals and alloys

[11p-D7-1~14] 15.5 Group IV crystals and alloys

Wed. Mar 11, 2015 1:30 PM - 5:15 PM D7 (16-207)

3:00 PM - 3:15 PM

[11p-D7-7] Difference in behavior of Si and Ge atoms for FLA crystallization

〇Naoto Matsuo1, Shota Hirano1, Akira Heya1, Yoshiaki Nakamura2, Takehiko Yokomori2, Masaki Yoshioka2 (1.Univ. of Hyogo, 2.USHIO INC.)

Keywords:crystallization,polycrystalline germanium,flash lamp anneal