The 62nd JSAP Spring Meeting, 2015

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Symposium » Fabrication and characterization of nano-structures prepared with advanced shadowing deposition systems

[11p-D9-1~7] Fabrication and characterization of nano-structures prepared with advanced shadowing deposition systems

Wed. Mar 11, 2015 1:15 PM - 5:00 PM D9 (16-304)

2:45 PM - 3:15 PM

[11p-D9-4] Fabrication of Isolated Nanocolumnar Compound Thin Films by Glancing-angle Deposition in Reactive Environments

〇Yasushi Inoue1, Osamu Takai2 (1.Chiba Inst. Technol., 2.Kanto Gakuin Univ.)

Keywords:self-shadowing effect,plasma processes,electrochromic