[11p-P2-1~15] 15.6 Group IV Compound Semiconductors

[11p-P2-10] Effect of Water Molecule Absorption on 4H-SiC Thermal Oxide Film

〇Tadashi Sato¹, Shin-Ichiro Kuroki¹, Seiji Ishikawa², Tomonori Maeda², Hiroshi Sezaki², Takamaro Kikkawa¹ (1.RNBS, Hiroshima Univ., 2.Phenitec Semicon)

Keywords:4H-SiC,Water Molecule Absorption