1:30 PM - 3:30 PM
[11p-P2-14] Formation of Ohmic Contact for p-type 4H-SiC Surface using Laser Anneal System
Keywords:Silicon carbide,Ohmic Contact,Laser Anneal
Poster presentation
15 Crystal Engineering » 15.6 Group IV Compound Semiconductors
Wed. Mar 11, 2015 1:30 PM - 3:30 PM P2 (Gymnasium)
1:30 PM - 3:30 PM
Keywords:Silicon carbide,Ohmic Contact,Laser Anneal