The 62nd JSAP Spring Meeting, 2015

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Poster presentation

15 Crystal Engineering » 15.6 Group IV Compound Semiconductors

[11p-P2-1~15] 15.6 Group IV Compound Semiconductors

Wed. Mar 11, 2015 1:30 PM - 3:30 PM P2 (Gymnasium)

1:30 PM - 3:30 PM

[11p-P2-13] Low resistance SiC/Metal ohmic contact formation by partial Amorphization and its Mechanism

〇(M2)DeSilva Milantha1, Shin-Ichiro Kuroki1, Seiji Ishikawa1, 2, Tomonori Maeda1, 2, Hiroshi Sezaki1, 2, Takamaro Kikkawa1 (1.Hiroshima Univ. RNBS, 2.Phenitec Semi.Corp.)

Keywords:SiC,Ohmic