[11p-P2-1~15] 15.6 Group IV Compound Semiconductors

[11p-P2-6] Observation of nano-hillock pair in 4H-SiC wafer by mirror projection electron microscopy, SEM and FIB-STEM

〇Toshiyuki Isshiki¹, Yoshihisa Orai², Takahiro Sato², Munetoshi Fukui² (1.Kyoto Inst. Tech., 2.Hitachi High-Tech)

Keywords:mirror projection electron microscope,SiC,surface defects and dislocations