The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.6 Semiconductor English Session

[12a-A23-1~12] 13.6 Semiconductor English Session

Thu. Mar 12, 2015 9:00 AM - 12:15 PM A23 (6A-216)

11:45 AM - 12:00 PM

▼ [12a-A23-11] Analytical Model for SiO2-IL Scavenging in HfO2/SiO2/Si Stacks

〇(DC)Xiuyan Li1, Takeaki Yajima1, Tomonori Nishimura1, Akira Toriumi1 (1.Univ. of Tokyo)

Keywords:SiO2-IL scavenging,HfO2/SiO2/Si stack,Analytical modeling