[12a-A23-1~12] 13.6 Semiconductor English Session

▲ [12a-A23-3] Interactions of individual dopants and macroscopic quantum dots in weakly-doped nanoscale SOI-FETs

〇Daniel Moraru¹, Yuki Takasu², Arup Samanta², Takeshi Mizuno², Michiharu Tabe² (1.Fac. Eng. Shizuoka U, 2.RIE, Shizuoka U)

Keywords:single dopant,quantum dot,single-electron tunneling