The 62nd JSAP Spring Meeting, 2015

Presentation information

Print

Oral presentation

13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations ofSi related materials

[12a-A27-1~9] 13.1 Fundamental properties, surface and interface, and simulations ofSi related materials

Thu. Mar 12, 2015 10:00 AM - 12:30 PM A27 (6A-202)

10:00 AM - 10:15 AM

[12a-A27-1] Annealing ambient dependence of Si surface flattening process

〇Sohya Kudoh1, Nithi Atthi1, Shun-ichiro Ohmi1 (1.Tokyo Tech)

Keywords:surface flattening process,Silicon,devise characteristics