The 62nd JSAP Spring Meeting, 2015

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Oral presentation

13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations ofSi related materials

[12a-A27-1~9] 13.1 Fundamental properties, surface and interface, and simulations ofSi related materials

Thu. Mar 12, 2015 10:00 AM - 12:30 PM A27 (6A-202)

10:45 AM - 11:00 AM

[12a-A27-4] The SiO2/Si interface structures evaluated by AES using Zr Lα source

〇Yuji Amano1, 2, Daisuke Kobayashi2, Hiroshi Nohira1, Kazuyuki Hirose2 (1.Tokyo City Univ, 2.ISAS/JAXA)

Keywords:silicone