The 62nd JSAP Spring Meeting, 2015

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[12a-A29-1~11] 13.4 Si wafer processing /MEMS/Integration technology

Thu. Mar 12, 2015 9:00 AM - 12:00 PM A29 (6A-204)

11:45 AM - 12:00 PM

[12a-A29-11] Fabrication and Demonstration of CMOS Inverter and Ring Oscillator Composed of Ultra-Thin Body Poly-Ge p- and n-MISFETs for Stacked Channel 3D-IC

〇Yoshiki Kamata1, Masahiro Koike1, Etsuo Kurosawa1, Masashi Kurosawa2, 3, Hiroyuki Ota1, Osamu Nakatsuka2, Shigeaki Zaima2, Tsutomu Tezuka1 (1.GNC-AIST, 2.Nagoya Univ., 3.JSPS)

Keywords:germanium,poly-crystalline,CMOS