[12a-A29-1~11] 13.4 Si wafer processing /MEMS/Integration technology

[12a-A29-10] Investigation of Relationship between Crystallization Speed and Off Current of TFT Fabricated by Atmospheric Pressure Micro-Thermal-Plasma-Jet Crystallized Germanium Film

〇Taichi Nakatani¹, Shohei Hayashi¹, Seiji Morisaki¹, Shogo Yamamoto¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)

Keywords:Thermal-Plasma-Jet,germanium,thin film transistor