[12a-A29-1~11] 13.4 Si wafer processing /MEMS/Integration technology

[12a-A29-9] Fabricating single-crystalline Silicon CMOS transistors on flexible substrate

〇Kohei Sakaike^{1, 2}, Akitoshi Nakagawa¹, Muneki Akazawa¹, Seiichiro Higashi^{1, 3} (1.Hiroshima Univ., 2.JSPS Research Fellow PD, 3.RNBS, Hiroshima Univ.)

Keywords:CMOS,single crystalline Silicon,plastic