The 62nd JSAP Spring Meeting, 2015

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Oral presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[12a-A29-1~11] 13.4 Si wafer processing /MEMS/Integration technology

Thu. Mar 12, 2015 9:00 AM - 12:00 PM A29 (6A-204)

11:00 AM - 11:15 AM

[12a-A29-8] Improved crystallinity of Si after BLDA toward multi-layer film structure photosensor

Kota Nakao1, 〇(M2)Charith Jayanada Koswaththage1, Tomohide Wakasugi1, Tatsuya Okada1, Takashi Noguchi1 (1.Univ. of the Ryukyus)

Keywords:Photosensor,BLDA,Crystallinity