The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[12a-C1-1~10] 6.2 Carbon-based thin films

Thu. Mar 12, 2015 9:00 AM - 11:45 AM C1 (6C-104)

9:00 AM - 9:15 AM

△ [12a-C1-1] Formation and evaluation of SiO2 gate dielectric films on diamond

〇(B)Takeshi Hara1, Tomohiro Hakamata1, Wako Ono1, Yuji Seshimo1, Yuya Hayashi1, Atsushi Hiraiwa1, Hiroshi Kawarada1 (1.Waseda Univ.)

Keywords:diamond,SiO2