The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[12a-C1-1~10] 6.2 Carbon-based thin films

Thu. Mar 12, 2015 9:00 AM - 11:45 AM C1 (6C-104)

9:30 AM - 9:45 AM

△ [12a-C1-3] Comparison of high-temperature electric characteristics of ALD-Al2O3 MOS capacitors between different gate-electrode materials

〇Daisuke Matsumura1, Tatsuya Saito1, Atsushi Hiraiwa1, Hiroshi Kawarada1 (1.Waseda Univ.)

Keywords:ALD,diamond,Al2O3