[12a-C1-1~10] 6.2 Carbon-based thin films

△ [12a-C1-7] Evaluation of potential profile of by Kelvin probe force microscopy and correlation with inside structures about a diamond lateral p-n junction

〇Kazuya Shirota^{1, 2}, Daisuke Takeuchi², Toshiharu Makino², Hiromitsu Kato², Masahiko Ogura², Satoshi Yamasaki^{1, 2} (1.Tsukuba Univ., 2.AIST)

Keywords:diamond semiconductor,Kelvin probe force microscopy