[12a-D1-1~12] Joint Session K

[12a-D1-8] Fabrication of ZnO films on c-plane sapphire substrate via nitrogen mediated crystallization: effects of grain density of buffer layers

Tomoaki Ide¹, Koichi Matsushima¹, Ryota Shimizu¹, Daisuke Yamashita¹, Hyunwoong Seo¹, Kazunori Koga¹, Masaharu Shiratani¹, 〇Naho Itagaki^{1, 2} (1.Kyushu University, 2.JST PREST)

Keywords:zinc oxide,buffer layer,sputtering