The 62nd JSAP Spring Meeting, 2015

Presentation information

Print

Oral presentation

6 Thin Films and Surfaces » 6.6 Probe Microscopy

[12a-D9-1~7] 6.6 Probe Microscopy

Thu. Mar 12, 2015 10:00 AM - 11:45 AM D9 (16-304)

10:45 AM - 11:00 AM

△ [12a-D9-4] Investigation of contact radios for high resolution SSRM measurement

〇Kazunori Harada1, Jun Hirota2, Tsukasa Nakai2, Yabuhara Hidehiko1 (1.Toshiba Corp. Corporate Manufacturing Engineering Center, 2.Toshiba Corp. S&S Products Company)

Keywords:SSRM