[12a-P13-1~11] 13.5 Semiconductor devices and related techologies

[12a-P13-5] Improvement of Mobility and SS for Strained Si_0.1Ge_0.9 on Strained-Si-on-Insulator (sSOI) pMOSFETs

〇Keiji Ikeda¹, Yoshihiko Moriyama¹, Toshifumi Irisawa¹, Mizuki Ono¹, Yuuichi Kamimuta¹, Minoru Oda¹, Tomonori Miyaki¹, Etsuo Kurosawa¹, Tsutomu Tezuka¹ (1.GNC-AIST)

Keywords:Strained-SiGe,Strained-Ge,Strained-SOI