The 62nd JSAP Spring Meeting, 2015

Presentation information

Poster presentation

13 Semiconductors » 13.5 Semiconductor devices and related techologies

[12a-P13-1~11] 13.5 Semiconductor devices and related techologies

Thu. Mar 12, 2015 9:30 AM - 11:30 AM P13 (Gymnasium)

9:30 AM - 11:30 AM

[12a-P13-5] Improvement of Mobility and SS for Strained Si0.1Ge0.9 on Strained-Si-on-Insulator (sSOI) pMOSFETs

〇Keiji Ikeda1, Yoshihiko Moriyama1, Toshifumi Irisawa1, Mizuki Ono1, Yuuichi Kamimuta1, Minoru Oda1, Tomonori Miyaki1, Etsuo Kurosawa1, Tsutomu Tezuka1 (1.GNC-AIST)

Keywords:Strained-SiGe,Strained-Ge,Strained-SOI