The 62nd JSAP Spring Meeting, 2015

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7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[12p-A11-1~21] 7.2 Applications and technologies of electron beams

Thu. Mar 12, 2015 1:30 PM - 7:00 PM A11 (6A-116)

3:00 PM - 3:15 PM

[12p-A11-7] Low Energy Secondary Electron Detector for SEM

〇Takashi Sekiguchi1, Hideo Iwai1 (1.NIMS)

Keywords:SEM,secondary electron,energy filter