[12p-A21-1~13] 13.8 Compound and power electron devices and process technology

[12p-A21-11] Suppressed Current Collapse in AlGaN/GaN HEMTs by High Pressure Water Vapor Annealing

Yohei Kobayashi¹, 〇Joel Asubar¹, Koji Yoshitsugu², Zenji Yatabe³, Hirokuni Tokuda¹, Masahiro Horita², Yukiharu Uraoka², Tamotsu Hashizume³, Masaaki Kuzuhara¹ (1.Univ. of Fukui, 2.Graduate School of Materials Science Nara Institute of Science and Technology, 3.RCIQE Hokkaido Univ.)

Keywords:AlGaN/GaN HEMT,Current Collapse