[12p-A29-1~11] How should we behave as future scientists? - Innovative value creation of integration technology by young generations -

[12p-A29-6] Study for hydrogen annealing effect after nitrogen plasma cleaning on interface of HfO₂/Al₂O₃/In_0.53Ga_0.47As

〇Seiko Netsu¹, Toru Kanazawa^{1, 2}, Yasuyuki Miyamoto^{1, 2} (1.Tokyo Inst., 2.Tokyo Inst Grad.)

Keywords:HfO2,Al2O3,InGaAs