The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[12p-C1-1~18] 6.2 Carbon-based thin films

Thu. Mar 12, 2015 1:15 PM - 7:00 PM C1 (6C-104)

4:00 PM - 4:15 PM

[12p-C1-11] Surface modification of DLC film by oxygen plasma treatment

〇(B)Yuta Kawachi1, Yasuharu Ohgoe1, Akihiko Homma1, Kenji Hirakuri1, Tatsuhiko Arafune1, Hiroo Noguchi1 (1.Tokyo Denki Univ.)

Keywords:DLC film,C=O bond