The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[12p-C1-1~18] 6.2 Carbon-based thin films

Thu. Mar 12, 2015 1:15 PM - 7:00 PM C1 (6C-104)

4:15 PM - 4:30 PM

△ [12p-C1-12] The volume change of Si-containing hydrogenated DLC films by the soft X-ray irradiation

〇Shotaro Tanaka1, Ryo Imai1, Makoto Okada1, Shinji Matsui1, Kazuhiro Kanda1 (1.LASTI, Univ. of Hyogo)

Keywords:Si-DLC,the soft X-ray,The volume change