The 62nd JSAP Spring Meeting, 2015

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Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[12p-C1-1~18] 6.2 Carbon-based thin films

Thu. Mar 12, 2015 1:15 PM - 7:00 PM C1 (6C-104)

4:45 PM - 5:45 PM

[12p-C1-13] [INVITED] Trends and Future Outlook of DLC Films Technology

〇Naoto Ohtake1 (1.Tokyo Tech)

Keywords:Diamond-like carbon,Deposition process,Hard coatings