The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[12p-C1-1~18] 6.2 Carbon-based thin films

Thu. Mar 12, 2015 1:15 PM - 7:00 PM C1 (6C-104)

6:00 PM - 6:15 PM

△ [12p-C1-15] Influence of Columnar Structures on the Gas Sensitivity of Amorphous Carbon Nitride Thin Films

〇Naoyuki Tamura1, Masami Aono1, Nobuaki Kitazawa1, Yoshihisa Watanabe1 (1.NDA)

Keywords:amorphous carbon nitride,electrical properties,gas sensitivity