The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[12p-C1-1~18] 6.2 Carbon-based thin films

Thu. Mar 12, 2015 1:15 PM - 7:00 PM C1 (6C-104)

6:15 PM - 6:30 PM

[12p-C1-16] a-CNx:H/Al Films Deposition for Field Emission Using Supermagnetron Plasma

〇Haruhisa Kinoshita1, Sho Suzuki1, Ryouhei Taguchi1, Hiroki Takeuchi1 (1.Shizuoka Univ., Grad. Sch. Eng.)

Keywords:supermagnetron plasma