The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[12p-C1-1~18] 6.2 Carbon-based thin films

Thu. Mar 12, 2015 1:15 PM - 7:00 PM C1 (6C-104)

1:45 PM - 2:00 PM

[12p-C1-3] Structures and optical constants of amorphous carbon film deposited by radio-frequency magnetron sputtering

〇Satoru Arakawa1, Yasuyuki Nakaya1, X.L. Zhou1, Sarayut Tunmee1, Keiji Komatsu1, Shigeo Ohshio1, Hidetoshi Saitoh1 (1.Nagaoka Univ. Tech.)

Keywords:amorphous carbon film,magnetron sputtering,optical constants