[12p-C1-1~18] 6.2 Carbon-based thin films

▲ [12p-C1-4] The chemical information evaluation of hydrogenated amorphous carbon films by XPS and NEXAFS at different thicknesses

〇(D)Sarayut Tunmee¹, Ratchadaporn Supruangnet², Hideki Nakajima², Xiaolong Zhou¹, Yasuyuki Nakaya¹, Satoru Arakawa¹, Keiji Komatsu¹, Shigeo Ohshio¹, Kazuhiro Kanda³, Hidetoshi Saitoh¹ (1.Nagaoka Univ. Tech., 2.SLRI, 3.LASTI, Univ. of Hyogo)

Keywords:Hydrogenated amorphous carbon,XPS,NEXAFS