The 62nd JSAP Spring Meeting, 2015

Presentation information

Print

Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[12p-C1-1~18] 6.2 Carbon-based thin films

Thu. Mar 12, 2015 1:15 PM - 7:00 PM C1 (6C-104)

2:15 PM - 2:30 PM

[12p-C1-5] Technology of low temperature thermal CVD for amorphous carbon film

〇Masayuki Kitamura1, satoshi Mizunaga1, Akira Shimizu1, Akinobu Kakimoto1, Yoshinobu Hayakawa2, Yasuhiro Hamada3 (1.Tokyo Electron Tohoku, 2.Tokyo Electron Miyagi, 3.Tokyo Electron)

Keywords:carbon,low temperature,CVD