The 62nd JSAP Spring Meeting, 2015

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17 Nanocarbon Technology » 17.1 Growth technology

[12p-D7-1~22] 17.1 Growth technology

Thu. Mar 12, 2015 1:15 PM - 7:00 PM D7 (16-207)

6:15 PM - 6:30 PM

[12p-D7-20] Multilayer layer graphene synthesis by Microwave Surface Wave Plasma CVD, and high quality according to ultraviolet light shading

〇Susumu Ichimura1, 2, Hideo Uchida1, Koichi Wakita1, Yasuhiko Hayashi2, Masayoshi Umeno1 (1.Chubu Univ., 2.Okayama Univ.)

Keywords:graphene,Microwave Surface Wave Plasma CVD,ultraviolet