[12p-D7-1~22] 17.1 Growth technology

△ [12p-D7-22] Initial growth observation of plasma CVD graphene for mass production

〇Ryuichi Kato¹, Satoshi Minami¹, Yuki Okigawa^{1, 2}, Ishihara Masatou^{1, 2}, Yamada Takatoshi^{1, 2}, Hasegawa Masataka^{1, 2} (1.TASC, 2.AIST)

Keywords:graphene,CVD,growth observation