[12p-D7-1~22] 17.1 Growth technology

[12p-D7-7] Evaluation of spacial distribution of graphene formed on SiC by Conductive AFM

〇Takuro Inamoto¹, Mariko Sato¹, Takeshi Fujii¹ (1.Fuji Electric)

Keywords:Conductive AFM,graphene,SiC