[12p-D8-1~19] 6.4 Thin films and New materials

△ [12p-D8-13] Solid-phase crystallization behavior of functional oxide thin films via post-annnealing under uniaxial compression

〇Yasuhisa Nozawa¹, Geng Tan¹, Tomoyuki Funabasama¹, Satoru Kaneko², Akifumi Matsuda¹, Mamoru Yoshimoto¹ (1.Tokyo Tech, 2.Kanagawa Ind. Tech.)

Keywords:oxide thin films,thermal nanoimprint,uniaxial compression