The 62nd JSAP Spring Meeting, 2015

Presentation information

Poster presentation

8 Plasma Electronics » 8.3 deposition of thin film and surface treatment

[12p-P10-1~8] 8.3 deposition of thin film and surface treatment

Thu. Mar 12, 2015 4:00 PM - 6:00 PM P10 (Gymnasium)

4:00 PM - 6:00 PM

[12p-P10-4] Fast rate lateral epitaxial overgrowth by mesoplasma chemical vapor deposition

〇Tetsuro Koyano1, Yusuke Imamura1, Makoto Kambara1 (1.UTokyo)

Keywords:CVD,plasma,LEO