4:00 PM - 6:00 PM
[12p-P10-3] Influence of groove depth on high-density capacitively coupled plasma with RF ring-shaped hollow electrode
Keywords:Sputtering,Functional thin film
Presentation information
Poster presentation
8 Plasma Electronics » 8.3 deposition of thin film and surface treatment
[12p-P10-1~8] 8.3 deposition of thin film and surface treatment
Thu. Mar 12, 2015 4:00 PM - 6:00 PM P10 (Gymnasium)