4:00 PM - 6:00 PM
△ [12p-P10-4] Fast rate lateral epitaxial overgrowth by mesoplasma chemical vapor deposition
Keywords:CVD,plasma,LEO
Presentation information
Poster presentation
8 Plasma Electronics » 8.3 deposition of thin film and surface treatment
[12p-P10-1~8] 8.3 deposition of thin film and surface treatment
Thu. Mar 12, 2015 4:00 PM - 6:00 PM P10 (Gymnasium)