[12p-P16-1~19] 15.4 III-V-group nitride crystals

[12p-P16-15] Sintered Tantalum Carbide Coatings on Graphite Substrates: Highly-Reliable Protective Coatings for Bulk and Epitaxial Film Growth

〇Daisuke Nakamura¹, Akitoshi Suzumura¹, Keisuke Shigetoh¹ (1.Toyota Central R&D Labs., Inc.)

Keywords:Tantalum carbide,AlN growth,SiC growth