[12p-P17-1~7] 15.5 Group IV crystals and alloys

[12p-P17-2] Detection of Effect of Strain and Composition on the Valence Band of SiGe by HXPES with High Spatial Resolution and XPS

〇Shunta Yamahori¹, Tomoya Sasago¹, Eisuke Yonekura¹, Kentarou Sawano¹, Eiji Ikenaga², Hiroshi Nohira¹ (1.Tokyo City Univ., 2.JASRI)

Keywords:XPS,SiGe,Uniaxial Strain