The 62nd JSAP Spring Meeting, 2015

Presentation information

Oral presentation

13 Semiconductors » 13.5 Semiconductor devices and related techologies

[13a-A23-1~10] 13.5 Semiconductor devices and related techologies

Fri. Mar 13, 2015 9:00 AM - 12:30 PM A23 (6A-216)

9:00 AM - 9:15 AM

[13a-A23-1] Development of the non-contact testing applying Pulse Photo-Conductiviyt Method

〇(M1)Kojiro Shimizu1, Kazuki Fukuda2, Jyunpei Fukashi1, Masaaki Furuta1, Masao Yoshioka2, Kazuhiro Kobayashi1, Hiroshi Kubota1, Keiichi Yoshinaga3 (1.GGST Kumamoto Univ., 2.Kumamoto Univ., 3.Tera probe)

Keywords:semiconductor device,evaluation test