[13a-A23-1~10] 13.5 Semiconductor devices and related techologies

[13a-A23-1] Development of the non-contact testing applying Pulse Photo-Conductiviyt Method

〇(M1)Kojiro Shimizu¹, Kazuki Fukuda², Jyunpei Fukashi¹, Masaaki Furuta¹, Masao Yoshioka², Kazuhiro Kobayashi¹, Hiroshi Kubota¹, Keiichi Yoshinaga³ (1.GGST Kumamoto Univ., 2.Kumamoto Univ., 3.Tera probe)

Keywords:semiconductor device,evaluation test